応用物理学会 集積化MEMS技術研究会主催
Organized by The Study Group of the Integrated MEMS, The Japan Society of Applied Physics

10:00-12:40, November 7, 2023
Main Hall, 4F, Kumamoto-Jo Hall

集積化MEMSシンポジウムの企画セッションとして，日本-台湾国際交流シンポジウムを開催します。今回は2016年平戸，2018年新竹・台北で開催されたシンポジウムの3回目となります。台湾からの4件を含む，6件の招待講演を企画しました。Future Technologies from KUMAMOTOに参加登録された方は皆さまご参加頂けます。皆様のご参加をお待ちしております。

The Japan-Taiwan Joint Symposium will be held at Future Technologies from Kumamoto as a special session within the Integrated MEMS Symposium. This symposium is the third symposium in the series, and will feature 6 invited talks including 4 speakers from Taiwan.
Those who registered for Future Technologies from KUMAMOTO 2023 are able to attend the session. We look forward to your participation.

Program Schedule

Session 7A2 10:00-11:15

10:00-10:25	“Thin Film Piezoelectric Technology in Volume Foundry for MEMS Applications” Sean Cheng, TSMC
10:25-10:50	“Technological Trends and Sensing Technologies for Semiconductor Production Equipment” Hisato Tanaka, Tokyo Electron
10:50-11:15	“Creating Semiconductor Devices for Each Customer with Minimal Fab to Shape the Future” Fumito Imura, Hundred Semiconductors
11:15-11:25	Break

Session 7A3 11:25-12:40

11:25-11:50	“Desk-top Chemical Plants Using Microfluidic Technology” Chihchen Chen, National Tsing Hua Univ.
11:50-12:15	“Triboelectric nanosensor: a prototype of self-powered sensor based on surface triboelectrification” Zong-Hong Lin, National Taiwan Univ.
12:15-12:40	“Low Power Intelligent Object Detection (LIOD): Empowering Sensing Intelligence in Edge Application” Masatoshi Yamai, PixArt Japan