Taiwan and Japan International Exchange Symposium - Speakers
CMOS MEMS for the Next Big Things - IoT
Prof. Weileun Fang, Distinguished Professor, Power Mechanical Eng.
Dept./NEMS Institute, National Tsing Hua University
Abstract:
Internet of Things (IoT) becomes a powerful engine to the fourth industrial revolution for humankind. As the key driver for IoT, the MEMS sensors/actuators have been widely employed in current consumer/wearable electronics. The mature CMOS fabrication processes are available in many IC foundries. It is cost-effective to exploit the existing CMOS fabrication technologies/facilities to implement MEMS devices. This talk introduces the applications of micro sensors for IoT, and also the approaches to implement and integrate various MEMS transducers using standard CMOS processes. Moreover, the MEMS eco-systems at Taiwan will be presented. To leverage the available eco-systems and MEMS technologies for IoT applications is highly expected.
CV:
Weileun Fang received his Ph.D. degree from Carnegie Mellon University in 1995. He joined the National Tsing Hua University (Taiwan) in 1996, where he is now a Distinguished Professor.
In 1999, he was at California Inst. Tech. as a visiting associate. His research interests include MEMS with emphasis on micro fabrication/packaging technologies, CMOS MEMS, micro sensors and actuators, and characterization of thin film mechanical properties.
Prof. Fang has published more than 150 referred journal papers, near 250 referred international conference papers, and 80 patents (all in MEMS field).
He is now the Editor-in-Chief of JMM, the Board Member of IEEE TDMR, and the Associate Editor of IEEE Sensors J., and Sensors and Actuators A.
He served as the General Chair of the World Micromachine Summit 2012. He also served as the TPC of IEEE MEMS conference, the EPC of Transducers conference, and the TPC Chair of IEEE Sensors 2012 conference.
He has become the member of ISC of Transducers from 2009, and will be the General Chair for Transducers 2017. Moreover, he also serves as a technical consultant for many MEMS companies in Taiwan.
Prof. Fang is the Fellow of the IEEE, and the IOP (Institute of Physics, UK).
Ion Image Sensor For Innovative Study of Biochemical Field
Prof. Kazuaki Sawada, Professor,
Department of Electrical and Electronic Information Engineering
Toyohashi University of Technology
CV:
Kazuaki Sawada was born in Kumamoto, Japan in 1963. He received his B.A. and M.S. degrees in electrical and electronic engineering in 1986, 1988, respectively, and he received a Ph.D. degree in system and information engineering in 1991, all from Toyohashi University of Technology, Aichi, Japan.
From 1991 to 1998, he was a Research Associate in the Research Institute of Electronics, Shizuoka University, Shizuoka, Japan. Since 1998, he joined the Department of Electrical and Electronic Engineering, Toyohashi University of Technology, where he is now serving as a Full Professor. Prof. Sawada is a director of of Electronics-Inspired Interdisciplinary Research Institute (EIIRIS), Toyohashi University of Technology. He was a guest professor of Technical University of Munich in 2005. He was the commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology, Research Category in 2013. Now he is a General Chair of Asia-Pacific Conference of Transducers and Micro-Nano Technology 2016 (APCOT2016).
Bridging the Gap from MEMS Prototype to Production
Dr. Jerwei Hsieh
Vice President, R&D.
Asia Pacific Microsystems Inc.
Abstract:
Entering into the Era of IoT nowadays, demand for MEMS sensors is on the rise.
To service that demand with reliable products, developers of MEMS devices need to know how to expedite product development to enable a fast time-to-production, so as to seize the market from a tinny window of opportunity.
This presentation will base on MEMS foundry point of view, to provide some useful information for developers.
Design for production will be introduced; some likely product failure mechanisms and how to avoid them will be highlighted; selection of manufacturing partners and how to leverage foundry's experiences will also be addressed.
CV:
Dr. Hsieh is responsible for R&D activities at APM, one of the top MEMS foundries in the world. He has over 20 years of experience dedicated in MEMS and Micro-fabrication development.
Dr. Hsieh also serves as VP Manufacturing of Iridium Medical Technology Co., Ltd, a development company producing active implantable devices.
Dr. Hsieh received his PhD degree at National Tsing-Hua University, and conducted his postdoctoral research as a visiting scholar at Stanford University.
He holds a dozen of patents and has published over tens of peer-reviewed papers. He had been served as the Steering Committee of IEEE Transducers conference, Tutorial Chair of IEEE Sensors Conference, and ETPC/TPC of several international conferences.
He is also the reviewer of Sensors & Actuators A, IEEE Sensors Journal, APEX, and JJAP.
Relating with CMOS-MEMS
Dr. Masanori Muroyama,
Associate Professor, Micro System Integration Center,
Tohoku University
CV:
Masanori Muroyama received the B.E., M.E. and Ph.D. degrees in computer science and communication engineering from Kyushu University, Japan.
From 2014, he is an associate professor at Tohoku University, Japan.
His research interests include low-power LSI design, hardware/software computer system co-design and MEMS-CMOS integration technologies for tactile sensor network system development and massively parallel EB lithography system development.
Recently, he is engaged in sensor system and application development with proposed platform CMOS-LSIs.
CMOS-MEMS Oscillators
Prof. Shung Shian Li
Professor, Institute of NanoEngineering and MicroSystems,
National Tsing Hua University
Abstract:
The recent progress on CMOS-MEMS resonators and oscillators will be delivered.
In resonators, the enhancement of quality factor, motional impedance, power handling, and thermal stability will be presented.
In oscillators, the optimization of micromechanical structures and sustaining circuits will be given, which greatly benefits phase noise, Allan deviation, stability, and power consumption of the implemented oscillators.
CV:
Sheng-Shian Li received the Ph.D. degree from the University of Michigan, Ann Arbor, MI, USA, in electrical engineering and computer science.
In 2007, he joined RF Micro Devices, Greensboro, NC, USA, where he was an R&D Senior Design Engineer for the development of MEMS resonators and filters.
In 2008, he joined the Institute of NEMS, National Tsing Hua University, Hsinchu, Taiwan, where he is currently a Professor. His research interests include nano/microelectromechanical systems, integrated resonators and sensors, RF MEMS, and CMOS-MEMS technology.
Dr. Li was a recipient of the Young Faculty Research Award from the National Tsing Hua University in 2013. In the same year, Dr. Li also received the Ta-Yu Wu Memorial Award from the Ministry of Science and Technology of Taiwan. Together with his students, he received the Best Student Paper Awards at the 2011 IEEE International Frequency Control Symposium and the 2012 IEEE Sensors Conference. He served as the TPC of the IEEE International Frequency Control Symposium (IFCS), IEEE Sensors Conference, and Transducers Conference. He served as the local organizing committee chair for the 2014 IEEE IFCS and TPC vice chair (Group 1) for the 2016 IEEE IFCS, respectively.
Development of Pixel-Parallel 3-D Integrated CMOS Image Sensors for Next-Generation Video Systems
Dr. Masahide Goto, Principal Research Engineer
Advanced Functional Devices Research Division
NHK Science and Technology Research Laboratories
CV:
Masahide Goto: He received the B.S., M.S., and Ph.D. degrees in electrical engineering from the University of Tokyo, Tokyo, Japan, in 1998, 2000, and 2013, respectively. He joined the Japan Broadcasting Corporation (NHK), Tokyo, Japan, in 2000, where he has been with the Science and Technology Research Laboratories. He has also been a lecturer at Tokyo City University since 2015. His current research interests include CMOS image sensors, 3-D integration technologies, and MEMS acoustic sensors. He is a member of IEEE, the Institute of Electrical Engineers of Japan (IEEJ), the Japan Society of Applied Physics (JSAP), and the Institute of Image Information and Television Engineers of Japan (ITE).
Polymer-based Microdevices
Prof. Yao-Joe Yang, Professor and Department Chair,
Department of Mechanical Engineering
National Taiwan University
Abstract:
This presentation covers three different polymer-based devices realized by using MEMS technology.
The first topic describes a magnetic hydrogel-based microgripper that can be wirelessly operated using magnetic fields, including locomotion and gripping motion.
Then a passive inertial switch using MWCNT-hydrogel composite integrated with an L-C resonator will be presented.
The phase-dip technique was employed to interrogate sensor signals.
Finally, we will report a 4x1 parylene micropipette array for locally and selectively functionalizing the surface of a CMOS-based hall sensor array with different capture antibodies.
With integrated microfluidic channels, functionalized magnetic beads can be captured and detected by the hall sensors.
CV:
Yao-Joe Yang received his M.S. and Ph. D. degrees in electrical engineering from the Massachusetts Institute of Technology (MIT EECS) in 1997 and 1999, respectively. Also, he received his M.S. degree (1995) from UCLA and B.S. degree (1990) from NTU, both in mechanical engineering.
From 1999 to 2000, he joined the Coventor Inc, (Cambridge, MA) as a senior application engineer. Since 2000, he joined the Department of Mechanical Engineering at the National Taiwan University. Since 2011, he serves as the department chairman (re-elected in 2014). He is the board director of the Chinese Institute of Automation Engineering (CIAE). He is also the board director of the Chinese Society of Mechanical Engineers (CSME), and the board director of ASME Taipei Chapter.
His research interests include microelectromechanical systems, nanotechnology, high-precision micromachining, flexible sensing arrays, sensor network, and semiconductor devices and vacuum microelectronics modeling. He has been consulted by more than three U.S-based companies and four Taiwan-based organizations. Dr. Yang is a member of IEEE. He is also the recipient of the Outstanding Research Award as well as Dr. Da-Yu Wu Memorial Award (Outstanding Young Researcher Award) of the National Science Council. He also received the NTU Outstanding Researcher Award.
Panel Discussion
"Research and Interchange between Taiwan and Japan: so far and from now on"
WeiLeun Fang (National Tsing Hua University)
Abstract:
The close collaboration between Japan and Taiwan in MEMS areas would bring mutual benefits.
In Tsing Hua, the Micro Device Laboratory (MDL) and Micro Sensors and Actuators Technology (µSAT) Consortium respectively act as the technology incubation and information/strategy networking hubs.
Welcome to leverage the MEMS eco-systems at Taiwan via MDL and µSAT.
Jerwei Hsieh (Asia Pacific Microsystems Inc.)
Abstract:
Based on our observation and experiences, we would like to have some conversation on different working styles in Taiwanese and Japanese companies, and accordingly have discussion on how to co-work more efficiently, so as to enhance international collaboration between industry companies in Japan and Taiwan.
Yao-Joe Yang (National Taiwan University)
Abstract:
Reliable and low-cost MEMS devices are widely deployed in the products for everyday use, such as cell phones, drones, wearable devices, and so on.
The applications using MEMS devices are the focus in developing these products.
It is worthy to discuss the development of MEMS devices deployed in future products.
Takayuki Ohba (Tokyo Institute of Technology)
Abstract:
To shortening of lead time including R&D is anticipated for the next competitive business in IoT market.
The integrated semiconductor and MEMS system with low cost and high energy efficiency based on "Mottainai" is a key to be developed.
There needs tangible target and total turn-key solution, taking future requirements of market into account.
Since Asian nations have huge market following more than 60% population, Taiwan and Japan have an opportunity and should take a leadership for manufacturing and standardization.
According to the Asian Industry Highway (AIH), a bilateral cooperation between Taiwan and Japan with sharing responsibility and development is essential to provide those solutions to the market and developing countries.
Shuji Tanaka (Tohoku University)
Abstract:
Recently, industry-university collaboration is not just for looking for fantastic seeds but for boosting internal research and development of the next-generation technology in companies. A variety of menus of industry-university collaboration are ready in our group, and our customers are not limited to domestic companies.
Industry support by international collaboration of universities is a good topic to be discussed.
Ichiro Yamashita (Osaka University)
Abstract:
Our group in NAIST and Osaka Univ. had/have two collaborative projects regarding LoC and biosensor with National Chiao Tung University.
We also had close collaboration with National Cheng Kung University group.
The start point was Taiwan-Japan joint-workshop by JST and private company strategy regarding mass-production. Japan-Taiwan can play complementary roles and make a prosperous future.