{"id":733,"date":"2022-11-09T18:27:48","date_gmt":"2022-11-09T09:27:48","guid":{"rendered":"https:\/\/sensorsymposium.org\/2025\/?page_id=733"},"modified":"2025-11-14T17:40:07","modified_gmt":"2025-11-14T08:40:07","slug":"photocon-pic","status":"publish","type":"page","link":"https:\/\/sensorsymposium.org\/2025\/photocon-pic\/","title":{"rendered":"2025\u5e74\u5fdc\u52df\u4f5c\u54c1"},"content":{"rendered":"\n

\u7814\u7a76\u5206\u91ce\u306e\u7570\u306a\u308b\u7814\u7a76\u8005\u3084\uff0cMEMS\uff0c\u5fae\u7d30\u52a0\u5de5\u7b49\u3092\u77e5\u3089\u306a\u3044\u4e00\u822c\u306e\u65b9\u304c\u8208\u5473\u3092\u6301\u3061\u305d\u3046\u306a\u5199\u771f\u3092\u52df\u4e00\u74b0\u3068\u3057\u3066\u30d5\u30a9\u30c8\u30b3\u30f3\u30c6\u30b9\u30c8\u3092\u958b\u50ac\u3057\u3066\u304d\u307e\u3057\u305f\u3002\u30df\u30ea\u90e8\u9580\u30fb\u30de\u30a4\u30af\u30ed\u90e8\u9580\u30fb\u30ca\u30ce\u90e8\u9580\u306e\u30b9\u30b1\u30fc\u30eb\u3054\u3068\u306e3\u90e8\u9580\uff0c\u9ad8\u6821\u751f\u90e8\u9580\uff0c\u4f01\u696d\u30b9\u30dd\u30f3\u30b5\u30fc\u90e8\u9580\uff0c\u30ed\u30b4\u30c7\u30b6\u30a4\u30f3\u90e8\u9580\u306b\u516821\u4f5c\u54c1\u306e\u3054\u5fdc\u52df\u3092\u9802\u304d\u307e\u3057\u305f\u3002\u4f1a\u671f\u4e2d\uff0c\u5fdc\u52df\u4f5c\u54c1\u3068\u4f5c\u54c1\u306e\u6982\u8981\u3092\u4f1a\u5834\u306e\u5165\u53e3\u4ed8\u8fd1\u306b\u5c55\u793a\u81f4\u3057\u307e\u3059\u3002\u30a2\u30fc\u30c8\u306e\u69d8\u306a\u5199\u771f\u304c\u64ae\u5f71\u3055\u308c\u308b\u307e\u3067\u306e\u5de5\u7a0b\u3084\u539f\u7406\u3092\u7406\u89e3\u3059\u308b\u3053\u3068\u3067\uff0c\u4f5c\u54c1\u3092\u3082\u3063\u3068\u8208\u5473\u6df1\u304f\u95b2\u89a7\u3067\u304d\u308b\u306e\u3067\u306f\u306a\u3044\u3067\u3057\u3087\u3046\u304b\u3002<\/p>\n\n\n\n

\u3010\u9ad8\u6821\u751f\u90e8\u9580\u3011<\/h3>\n\n\n\n\n\n\n
\"HS1<\/div>
 \u7279\u5225\u8cde <\/span><\/span> HS1 \u50d5\u304c\u898b\u3064\u3081\u308b\u672a\u6765<\/div>\u798f\u4e95 \u5fc3\u5be7\uff08\u6803\u6728\u770c\u7acb\u9e7f\u6cbc\u5546\u5de5\u9ad8\u7b49\u5b66\u6821\uff09
\u30c8\u30f3\u30dc\u304c\u76ee\u306e\u524d\u306b\u6b62\u307e\u3063\u305f\u6642\u306b\uff0c\u9003\u3052\u306a\u3044\u3088\u3046\u3086\u3063\u304f\u308a\u8fd1\u3065\u304d\u306a\u304c\u3089\u3068\u3063\u305f\u4e00\u679a\u3067\u3059\u3002<\/td>\n
\"HS2\u5927\u4eba\u306b\u306a\u308c\u306a\u304b\u3063\u305f\u8005\u305f\u3061\"<\/div>
HS2\u5927\u4eba\u306b\u306a\u308c\u306a\u304b\u3063\u305f\u8005\u305f\u3061<\/div>\u798f\u4e95 \u5fc3\u5be7\uff08\u6803\u6728\u770c\u7acb\u9e7f\u6cbc\u5546\u5de5\u9ad8\u7b49\u5b66\u6821\uff09
\u30cf\u30c1\u306e\u5de3\u304c\u843d\u3061\u3066\u3044\u3066\uff0c\u305d\u306e\u4e2d\u3092\u306e\u305e\u3044\u305f\u3089\u307e\u3060\u5e7c\u866b\u304c\u5165\u3063\u3066\u3044\u308b\u72b6\u614b\u3060\u3063\u305f\u306e\u3067\uff0c\u305d\u3053\u3092\u72d9\u3063\u3066\u64ae\u308a\u307e\u3057\u305f\u3002<\/td>\n<\/tr>\n
\"HS3<\/div>
 \u7279\u5225\u8cde <\/span><\/span> HS3 \u9727\u6c37<\/div>\u4e2d\u91ce \u512a\u7f8e\uff08\u6803\u6728\u770c\u7acb\u9e7f\u6cbc\u6771\u9ad8\u7b49\u5b66\u6821\uff09
\u30a4\u30aa\u30f3\u5316\u50be\u5411\u306e\u5b9f\u9a13\u3067\u91d1\u5c5e\u6a39\u3092\u4f5c\u6210\u3057\u307e\u3057\u305f\u304c\uff0c\u9855\u5fae\u93e1\u3067\u5fae\u7d30\u69cb\u9020\u3092\u64ae\u5f71\u3057\u307e\u3057\u305f\u3002<\/td>\n
\"HS4<\/div>
HS4 \u659c\u65b9\u786b\u9ec4<\/div>\u4e2d\u91ce \u512a\u7f8e\uff08\u6803\u6728\u770c\u7acb\u9e7f\u6cbc\u6771\u9ad8\u7b49\u5b66\u6821\uff09
\u540c\u7d20\u4f53\u306e\u5b9f\u9a13\u3067\uff0c\u659c\u65b9\u786b\u9ec4\u3092\u3064\u304f\u308a\uff0c\u9855\u5fae\u93e1\u3067\u64ae\u5f71\u3057\u307e\u3057\u305f\u3002<\/td>\n<\/tr>\n<\/tbody><\/table>\n\n\n\n

\u3010\u30ca\u30ce\u90e8\u9580: \u5199\u771f\u306e\u9577\u8fba\u304c100 \u00b5m\u672a\u6e80\u306e\u4f5c\u54c1\u3011<\/h3>\n\n\n\n\n\n\n
\"NM1<\/div>
 \u6700\u512a\u79c0\u8cde <\/span><\/span> NM1 \u671d\u793c\uff0c\u59cb\u307e\u308b\u3063\u3066\u3088\u3002<\/div>\u6cb3\u4e95 \u54f2\u5b50, \u4e09\u7530 \u5409\u90ce\uff08\u6771\u4eac\u5927\u5b66\uff09
\u590f\uff0c\u671d\u793c\u304c\u59cb\u307e\u308a\u307e\u3059\u3002\u9577\u3044\u6821\u9577\u306e\u8a13\u8a71\uff0c\u4f55\u3060\u304b\u30c0\u30eb\u304417\u6b73\u306e\u590f\u3002\u4f5c\u54c1\u306f Cu-Ni-Cu \u306e\u30ca\u30ce\u3081\u3063\u304d\u30d4\u30e9\u30fc\u69cb\u9020\u4f53\u3067\u3059\u3002<\/td>\n
\"NM2<\/div>
NM2 \u6625\u306e\u7570\u7269<\/div>\u4fe1\u592a \u667a\u8cb4\uff08\u57fc\u7389\u5927\u5b66\uff09
\u5473\u899a\u30bb\u30f3\u30b5\u306e\u8868\u9762\u69cb\u9020\u3092\u78ba\u8a8d\u3057\u3066\u3044\u308b\u4e2d\uff0c\u305d\u3053\u306f\u898b\u6163\u308c\u306c\u7570\u7269\u3002\u3060\u304c\uff0c\u3069\u3053\u304b\u3067\u76ee\u306b\u3057\u3066\u3044\u308b\u3002\u4e8c\u6708\u2015\u3053\u306e\u7570\u7269\u306f\uff0c\u82b1\u7c89\u306e\u30e6\u30fc\u30d3\u30c3\u30b7\u30e5\u5c0f\u4f53\u3068\u547c\u3070\u308c\u308b\u5fae\u7d30\u306a\u7a81\u8d77\u3002\u79c1\u306f\u30e2\u30ce\u30af\u30ed\u30fc\u30e0\u306e\u4e16\u754c\u3067\u6625\u3092\u611f\u3058\u305f\u3002<\/td>\n<\/tr>\n
\"NM3<\/div>
 \u512a\u79c0\u8cde <\/span><\/span> NM3 \u30ca\u30ce\u5b87\u5b99\u306e\u60d1\u661f\u3068\u885b\u661f<\/div>\u574a\u91ce \u614e\u6cbb, \u5c0f\u897f \u8061\uff08\u7acb\u547d\u9928\u5927\u5b66\uff09
\u30de\u30a4\u30af\u30ed\u30b5\u30a4\u30ba\u306e\u6ef4\u4e2d\u306b\u9589\u3058\u8fbc\u3081\u3089\u308c\u305f\u7570\u65b9\u6027\u5206\u5b50\u306e\u30a2\u30cb\u30fc\u30eb\u904e\u7a0b\u306e\u9855\u5fae\u93e1\u50cf\u3067\u3059\u3002\u30de\u30a4\u30af\u30ed\u6ef4\u306e\u5468\u308a\u306b\u306f\uff0c\u307e\u308b\u3067\u885b\u661f\u306e\u3088\u3046\u306a\u5c0f\u3055\u306a\u6ef4\u304c\u6f02\u3063\u3066\u3044\u307e\u3059\u3002\u305d\u306e\u4e2d\u3067\u30ca\u30ce\u30b5\u30a4\u30ba\u306e\u5206\u5b50\u306e\u914d\u5411\u304c\u523b\u4e00\u523b\u3068\u5909\u5316\u3057\u3066\u3044\u307e\u3059\u3002<\/td>\n
\"NM4<\/div>
NM4 \u6975\u591c\u3092\u4ef0\u3050\u30da\u30f3\u30ae\u30f3<\/div>\u5409\u7530 \u5b89\u7d00\u5f66\uff08\u6771\u4eac\u5927\u5b66\uff09
\u30a6\u30a7\u30cf\u3092\u5207\u65ad\u3059\u308b\u3068\uff0c\u30b5\u30d6\u30df\u30ea\u304b\u3089\u30ca\u30ce\u30b5\u30a4\u30ba\u306e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u304c\u591a\u6570\u767a\u751f\u3057\u307e\u3059\u3002\u30c1\u30c3\u30d7\u8868\u9762\u306e\u305d\u308c\u3089\u3092\u3069\u3046\u53d6\u308a\u9664\u304f\u304b\u304c\u3053\u3053\u6700\u8fd1\u306e\u8ab2\u984c\u3067\u3057\u305f\u3002\u3053\u306e\u5199\u771f\u306f\uff0c\u305d\u306e\u3046\u3061\u306e\u7d04100 µm\u306e\u30d1\u30fc\u30c6\u30a3\u30af\u30eb\u306e\u4e00\u90e8\u5206\u3067\u3059\u3002<\/td>\n<\/tr>\n<\/tbody><\/table>\n\n\n\n

\u3010\u30de\u30a4\u30af\u30ed\u90e8\u9580\uff1a\u5199\u771f\u306e\u9577\u8fba\u304c100 \u00b5m\u4ee5\u4e0a\uff0c1000 \u00b5m\u672a\u6e80\u306e\u4f5c\u54c1\u3011<\/h3>\n\n\n\n\n\n\n\n\n
\"UM1<\/div>
 \u73fe\u5730\u6295\u7968\u90e8\u9580 <\/span><\/span> UM1 \u30de\u30a4\u30af\u30ed\u6b6f<\/div>\u5bd2\u5ddd \u96c5\u4e4b\uff08\u65b0\u6f5f\u5927\u5b66\uff09
\u6574\u7136\u3068\u9023\u306a\u308b\u5fae\u7d30\u69cb\u9020\u304c\uff0c\u307e\u308b\u3067\u6b6f\u5217\u306e\u3088\u3046\u306b\u3082\u898b\u3048\u307e\u3059\u3002\u305d\u306e\u4e2d\u306b\uff0c\u30df\u30af\u30ed\u306e\u4e16\u754c\u304c\u6301\u3064\u79e9\u5e8f\u3068\u7f8e\u3057\u3055\u3092\u611f\u3058\u53d6\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002<\/td>\n
\"UM2<\/div>
 \u512a\u79c0\u8cde <\/span><\/span> UM2 \u30df\u30af\u30ed\u306e\u5c0e\u706b\u7dda<\/div>\u5c0f\u6797 \u96c5\u53f2\uff08\u65e9\u7a32\u7530\u5927\u5b66\uff09
\u30de\u30a4\u30af\u30ed\u6d41\u8def\u5185\u3067\u306e\u30da\u30ed\u30d6\u30b9\u30ab\u30a4\u30c8\u91cf\u5b50\u30c9\u30c3\u30c8\u5408\u6210\u306e\u86cd\u5149\u9855\u5fae\u93e1\u50cf\u3002\u4eca\u306b\u3082\u4f55\u304b\u304c\u8d77\u3053\u308a\u305d\u3046\u306a\u7dca\u5f35\u611f\u3068\uff0c\u5fae\u5c0f\u306a\u304c\u3089\u30c0\u30a4\u30ca\u30df\u30c3\u30af\u306a\u5408\u6210\u306e\u69d8\u5b50\u3092\u8868\u73fe\u3057\u3066\u3044\u307e\u3059\u3002<\/td>\n<\/tr>\n
\"UM3<\/div>
 \u6700\u512a\u79c0\u8cde <\/span><\/span> UM3 \u8449\u3063\u3071<\/div>\u7530\u4e0a\u7adc\u4e5f\uff0c\u5cef\u7530\u8cb4\uff08\u5c71\u5f62\u5927\u5b66\uff09
\u30dd\u30b8\u578b\u30ec\u30b8\u30b9\u30c8\u4e0a\u306bSU-8\u5c64\u3092\u5f62\u6210\u3057\u305f\u3068\u3053\u308d\uff0c\u30d9\u30fc\u30af\u4e0d\u8db3\u3067\u6c17\u6ce1\u3068\u30b7\u30ef\u304c\u767a\u751f\u3057\uff65\uff65\uff65\u9ec4\u7dd1\u8272\u306e\u53ef\u611b\u3044\u30de\u30a4\u30af\u30ed\u201d\u8449\u3063\u3071\u201d\u304c\u3067\u304d\u307e\u3057\u305f\uff01\uff08\u753b\u50cf\u30b5\u30a4\u30ba\uff1a600 µm\u2715450 µm\uff09<\/td>\n
\"UM4<\/div>
UM4 \u4e0a\u7a7a\u304b\u3089\u898b\u305f\u7530\u5712\u98a8\u666f<\/div>\u5927\u69fb \u529b\u8f1d\uff0c \u5cef\u7530 \u8cb4\uff08\u5c71\u5f62\u5927\u5b66\uff09
PDMS\u4e0a\u306eAl\u819c\u304c\u76db\u308a\u4e0a\u304c\u3063\u3066\u6fc3\u3044\u7dd1\u306e\u5c71\u3005\u306b\u306a\u308a\uff0cAl\u819c\u304c\u5265\u304c\u308c\u305f\u500b\u6240\u306ePDMS\u8868\u9762\u306b\u306f\u4e80\u88c2\u304c\u751f\u3058\u3066\u9ec4\u8272\u3044\u7530\u3093\u307c\u304c\u7121\u6570\u306b\u3067\u304d\uff65\uff65\uff65\u5c71\u5f62\u306e\u7530\u5712\u5730\u5e2f\u306e\u822a\u7a7a\u5199\u771f\u307f\u305f\u3044\u3002\u30ea\u30a2\u30eb\u3059\u304e\u3066\u718a\u307e\u3067\u51fa\u6ca1\u3057\u305d\u3046!?<\/td>\n<\/tr>\n
\"UM5<\/div>
UM5 \u5341\u5b57\u9a0e\u58eb\u56e3\u306e\u7d0b\u7ae0<\/div>\u7530\u4e0a \u7adc\u4e5f, \u5c71\u7530 \u77e5\u6a39, \u5cef\u7530 \u8cb4\uff08\u5c71\u5f62\u5927\u5b66\uff09
SU-8\u5c64\u306e\u4e0a\u306bAl\u819c\u3092\u84b8\u7740\u3057\u3066\u304a\u308a\u307e\u3057\u305f\u304c\uff0c\u30a2\u30e9\u30a4\u30e1\u30f3\u30c8\u30de\u30fc\u30af\u90e8\u3067\u672a\u9732\u5149\u306eSU-8\u304c\u30a4\u30a4\u98a8\u5408\u3044\u3067\u30b7\u30ef\u30b7\u30ef\u306b\u306a\u308a\uff0c\u5341\u5b57\u9a0e\u58eb\u56e3\u98a8\u306e\u7d0b\u7ae0\u304c\u51fa\u6765\u4e0a\u304c\u308a\u307e\u3057\u305f\u3002<\/td>\n
\"UM6<\/div>
UM6 100\u30df\u30af\u30ed\u30f3\u306e\u30cb\u30b1<\/div>\u5ee3\u5b89 \u5e78\u5fd7\u90ce\uff08\u6771\u4eac\u5927\u5b66\uff09
\u30c0\u30a4\u30b7\u30f3\u30b0\u5f8c\u306e\u30c1\u30c3\u30d7\u306e\u4e0a\u306b\u4e57\u3063\u3066\u3044\u308b\u52a0\u5de5\u304f\u305a\u3092SEM\u3067\u6349\u3048\u307e\u3057\u305f\u3002\u305d\u306e\u9020\u5f62\u306f\uff0c\u3042\u305f\u304b\u3082\u8239\u9996\u306b\u821e\u3044\u964d\u308a\u308b\u52dd\u5229\u306e\u5973\u795e\u30b5\u30e2\u30c8\u30e9\u30b1\u306e\u30cb\u30b1\u3092\u601d\u308f\u305b\u308b\uff0c\u30c0\u30a4\u30ca\u30df\u30c3\u30af\u306a\u6d41\u52d5\u6027\u3068\u529b\u5f37\u3044\u8e8d\u52d5\u611f\u306b\u6e80\u3061\u3066\u3044\u307e\u3059\u30022200\u5e74\u306e\u6642\u3092\u7d4c\u3066\u30af\u30ea\u30fc\u30f3\u30eb\u30fc\u30e0\u3067\u751f\u307e\u308c\u305f\u30d8\u30ec\u30cb\u30ba\u30e0\u5f6b\u523b\u306b\u901a\u3058\u308b\u5076\u7136\u306e\u7f8e\u3092\u3054\u4f53\u611f\u304f\u3060\u3055\u3044\u3002<\/td>\n<\/tr>\n
\"UM7<\/div>
UM7 \u30de\u30a4\u30af\u30ed\u5b87\u90fd\u5bae\u9903\u5b50\u306e\u51fa\u6765\u4e0a\u304c\u308a\uff01<\/div>\u85e4\u7530 \u7406\u7d17\uff08\u65e9\u7a32\u7530\u5927\u5b66\uff09
\u6db2\u6ef4\u878d\u5408\u306e\u5076\u7136\u304c\u751f\u307f\u51fa\u3057\u305f\uff0c\u5b87\u90fd\u5bae\u306e\u5473\u3068\u3044\u3048\u3070\u9903\u5b50\u3002 \u9855\u5fae\u93e1\u306e\u4e2d\u306b\u3082\uff0c\u7f8e\u5473\u3057\u305d\u3046\u306a\u77ac\u9593\u304c\u3042\u308a\u307e\u3059\u3002<\/td>\n
\"UM8<\/div>
UM8 \u5357\u6975\u5927\u9678\u306e\u5965\u5730\u3067\u767a\u898b<\/div>\u60c5\u91ce \u8ce2,\u9060\u5800 \u7dbe\u91cc,\u5c71\u53e3 \u7d17\u7f85,\u7b20\u539f \u5d07\u53f2\uff08\u6cd5\u653f\u5927\u5b66\uff09
FTO\u57fa\u677f\u306b\u6210\u819c\u3057\u305f\u9178\u5316\u30c1\u30bf\u30f3\u30ca\u30ce\u7c92\u5b50\u8868\u9762\u3092\u30c7\u30b8\u30bf\u30eb\u30de\u30a4\u30af\u30ed\u30b9\u30b3\u30fc\u30d7\u3067\u64ae\u5f71\u3057\u307e\u3057\u305f\u3002 \u30ca\u30ce\u7c92\u5b50\u306e\u5c64\u304c\u539a\u304f\uff0c\u3080\u304d\u51fa\u3057\u306e\u5316\u77f3\u3084\u5357\u6975\u306e\u30af\u30ec\u30d0\u30b9\u306e\u3088\u3046\u306a\u30af\u30e9\u30c3\u30af\u304c\u767a\u751f\u3057\u3066\u3044\u307e\u3059\u3002<\/td>\n<\/tr>\n<\/tbody><\/table>\n\n\n\n

\u3010\u30df\u30ea\u90e8\u9580\uff1a\u5199\u771f\u306e\u9577\u8fba\u304c1 mm\u4ee5\u4e0a\u306e\u4f5c\u54c1\u3011<\/h3>\n\n\n\n\n\n\n\n
\"MM1<\/div>
 \u6700\u512a\u79c0\u8cde <\/span><\/span> MM1 Gyoza-inspired Kirigami<\/div>\u6749\u539f \u5927\u6a39\uff08\u65e9\u7a32\u7530\u5927\u5b66\uff09
\u5b87\u90fd\u5bae\u958b\u50ac\u306b\u3061\u306a\u307f\uff0cGyoza\u3068Kirigami\u306e\u6280\u8853\u3092\u878d\u5408\u3057\u305f\u30c7\u30d0\u30a4\u30b9\u3092\u88fd\u4f5c\u3057\u307e\u3057\u305f\uff0e\u76bf\u306e\u4e0a\u3067\u5f15\u3063\u5f35\u308c\u3070\uff0c\u30de\u30a4\u30af\u30ed\u30b5\u30a4\u30ba\u306e\u9903\u5b50\u304c\u4e00\u6589\u306b\u8d77\u304d\u4e0a\u304c\u3063\u3066\u5b9a\u98df\u304c\u5b8c\u6210\u3057\u307e\u3059\uff0e\u6b21\u56de\u306f\u4f50\u91ce\u30e9\u30fc\u30e1\u30f3\u3082\u8d77\u304d\u4e0a\u3052\u3066\u307f\u307e\u3059\uff0e<\/td>\n
\"MM2<\/div>
MM2 \u305f\u304a\u3084\u304b\u306a\u308b\u4e2d\u7985\u5bfa\u6e56<\/div>\u6749\u539f \u5927\u6a39\uff08\u65e9\u7a32\u7530\u5927\u5b66\uff09
\u610f\u56f3\u305b\u306c\u5fdc\u529b\u3067\u6e7e\u66f2\u3057\u305fKirigami\u30df\u30e9\u30fc\u30a2\u30ec\u30a4\u3067\u3059\uff0e\u9ad8\u3055\u306e\u7570\u306a\u308b\u81a8\u3089\u3093\u3060\u6ce2\u304c\u8f1d\u304d\uff0c\u65e5\u5149\u3067\u898b\u305f\u4e2d\u7985\u5bfa\u6e56\u306e\u6c34\u9762\u3092\u601d\u308f\u305b\u308b\u3082\u306e\u3067\u3057\u305f\uff0e\u4eca\u5f8c\u3082\u7814\u947d\u3092\u91cd\u306d\uff0c\u83ef\u53b3\u306e\u6edd\u307e\u3067\u4f5c\u308b\u6240\u5b58\u3067\u3059\uff0e<\/td>\n<\/tr>\n
\"MM3<\/div>
 \u512a\u79c0\u8cde <\/span><\/span> MM3 \u57f9\u990a\u3057\u305f\u7b4b\u8089\u3067\u52d5\u304b\u3059\u30ed\u30dc\u30c3\u30c8<\/div>\u5927\u5834 \u7fd4\u592a\uff08\u6771\u4eac\u5927\u5b66\uff09
\u3053\u306e\u30ed\u30dc\u30c3\u30c8\u306f\uff0c\u5b9f\u9a13\u5ba4\u3067\u57f9\u990a\u3057\u305f\u300c\u751f\u304d\u305f\u7b4b\u8089\u300d\u3092\u52d5\u529b\u6e90\u3068\u3057\u3066\u6b69\u884c\u3057\u307e\u3059\u3002 \u642d\u8f09\u3055\u308c\u305f\u7b4b\u8089\u306b\u96fb\u5727\u3067\u523a\u6fc0\u3092\u4e0e\u3048\u308b\u3068\uff0c\u7b4b\u8089\u304c\u53ce\u7e2e\u3057\u307e\u3059\u3002\u3053\u306e\u53ce\u7e2e\u3059\u308b\u529b\u3092\u5229\u7528\u3057\u3066\u811a\u3092\u52d5\u304b\u3057\uff0c\u4e00\u6b69\u4e00\u6b69\uff0c\u524d\u3078\u9032\u307f\u307e\u3059\u3002<\/td>\n
\"MM4<\/div>
MM4 \u5149\u306e\u56de\u5eca<\/div>\u5b89\u6c38 \u7ae3\uff08\u6771\u4eac\u5927\u5b66\uff09
Silicon on Insulator\u57fa\u677f\u306e\u30cf\u30f3\u30c9\u30eb\u5c64\u3092\u6df1\u5800\u308a\u30a8\u30c3\u30c1\u30f3\u30b0\uff0e\u30a2\u30f3\u30c0\u30fc\u30ab\u30c3\u30c8\u304c\u6df1\u304f\uff0c\u30de\u30b9\u30af\u6750 (SiO2) \u3068Si\u57fa\u677f\u306e\u9593\u306b\u5e72\u6e09\u7e1e\u3092\u751f\u3058\u307e\u3057\u305f\uff0e\u51b7\u5374\u304c\u4e0d\u5341\u5206\u3067\u3057\u305f\uff0e<\/td>\n<\/tr>\n
\"MM5<\/div>
MM5 \u8679\u306e\u5e79\u2015\u5c64\u6d41\u304c\u5c0e\u304f\u4e03\u8272<\/div>\u7af9\u5185 \u7422\u767b\uff08\u6176\u61c9\u7fa9\u587e\u5927\u5b66\uff09
\u30d5\u30a9\u30c8\u30ea\u30bd\u30b0\u30e9\u30d5\u30a3\u3067\u4f5c\u88fd\u3057\u305f\u6a39\u72b6\u30de\u30a4\u30af\u30ed\u6d41\u8def\u306b\u8907\u6570\u306e\u8272\u6c34\u3092\u5c64\u6d41\u3067\u5c0e\u5165\u3057\uff0c\u6df7\u3056\u3089\u306a\u3044\u307e\u307e\u5408\u6d41\u30fb\u5206\u5c90\u3059\u308b\u904e\u7a0b\u3092\u53ef\u8996\u5316\u3057\u305f\uff0e\u5e79\u3067\u51fa\u4f1a\u3044\uff0c\u679d\u3067\u5225\u308c\u308b\u6d41\u308c\u304c\u4e03\u8272\u306e\u5206\u914d\u3068\u3057\u3066\u73fe\u308c\u308b\u77ac\u9593\u3092\uff0c\u4e00\u679a\u306b\u8a18\u9332\u3057\u3066\u3044\u308b\uff0e<\/td>\n
<\/td>\n<\/tr>\n<\/tbody><\/table>\n\n\n\n\n","protected":false},"excerpt":{"rendered":"

\u7814\u7a76\u5206\u91ce\u306e\u7570\u306a\u308b\u7814\u7a76\u8005\u3084\uff0cMEMS\uff0c\u5fae\u7d30\u52a0\u5de5\u7b49\u3092\u77e5\u3089\u306a\u3044\u4e00\u822c\u306e\u65b9\u304c\u8208\u5473\u3092\u6301\u3061\u305d\u3046\u306a\u5199\u771f\u3092\u52df\u4e00\u74b0\u3068\u3057\u3066\u30d5\u30a9\u30c8\u30b3\u30f3\u30c6\u30b9\u30c8\u3092\u958b\u50ac\u3057\u3066\u304d\u307e\u3057\u305f\u3002\u30df\u30ea\u90e8\u9580\u30fb\u30de\u30a4\u30af\u30ed\u90e8\u9580\u30fb\u30ca\u30ce\u90e8\u9580\u306e\u30b9\u30b1\u30fc\u30eb\u3054\u3068\u306e3\u90e8\u9580\uff0c\u9ad8\u6821\u751f\u90e8\u9580\uff0c\u4f01\u696d\u30b9\u30dd\u30f3\u30b5\u30fc\u90e8 … \u7d9a\u304d\u3092\u8aad\u3080 2025\u5e74\u5fdc\u52df\u4f5c\u54c1<\/span> →<\/span><\/a><\/p>\n","protected":false},"author":2,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-733","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/sensorsymposium.org\/2025\/wp-json\/wp\/v2\/pages\/733","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/sensorsymposium.org\/2025\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/sensorsymposium.org\/2025\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/sensorsymposium.org\/2025\/wp-json\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/sensorsymposium.org\/2025\/wp-json\/wp\/v2\/comments?post=733"}],"version-history":[{"count":69,"href":"https:\/\/sensorsymposium.org\/2025\/wp-json\/wp\/v2\/pages\/733\/revisions"}],"predecessor-version":[{"id":2996,"href":"https:\/\/sensorsymposium.org\/2025\/wp-json\/wp\/v2\/pages\/733\/revisions\/2996"}],"wp:attachment":[{"href":"https:\/\/sensorsymposium.org\/2025\/wp-json\/wp\/v2\/media?parent=733"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}